The amine-based chemical solvent EKC265 is formulated to remove post-etch residue from the wafer. The Semicon Process Refractometer is widely used to monitor the water content of the solvent. Field studies and experience have shown that the O-ring between the refractometer instrument body and flow cell has limited lifetime in EKC265. The current standard O-ring material is a perfluoroelastomer of Kalrez 6375UP, manufactured by Dupont, and this material has shown swelling after 6 months in use.
Preventive maintenance replacement of the O-ring PR-9252 every 6 months will ensure equipment reliability and prevent O-ring failure.
